采用Pechini法,通过涂覆、烧结和退火,制备成系列含硅的RuO2-SiO2/Ti样品。二元涂层的摩尔成分为X%RuO2-Y%SiO2(以下简写为RuxSiyO2)。采用SEM和XRD方法分析了该阳极涂层材料的组织结构特征。结果表明所制备的涂层的相结构主要由金红石相的RuO2所组成,高温处理出现金红石相TiO2,加入的硅以非晶态SiO2的形式存在。经450℃处理的含硅样品的平均晶粒尺寸均小于10nm,明显低于不含硅的样品。同时具有很强的尺寸稳定性,即使经800℃退火处理后,涂层的平均晶粒尺寸仍在45nm以下。这表明掺杂适量的非晶态SiO2组元,可以明显细化晶粒,稳定相结构,同时可粘连分散的活性组元颗粒,起到“支架”的作用。
In the paper, series samples of RuO2-SiO2 coated titanium were prepared by the Pechini method. The molar concentrations of the binary oxide coatings X%RuO2-Y%SiO2 were denoted as RuxSiyO2. Each coating was prepared through painting, sintering and annealing. The microstructure of the coating was observed by SEM. The phase structure and the average grain size of the coating were investigated by XRD. It is demonstrated that ruffle RuO2 is the main crystalline phase in the coatings. The added Si is in the form of a non-crystalline SiO2 phase. All the grain sizes in Si-containing samples treated at 450℃ are not larger than 10nm, which are obvious smaller than those of non-silicon sample. The crystal grains show their thermal stability. The average grain sizes of the coatings are less than 45nm, even after annealed at 800℃. All the data illustrate that the adding of SiO2 can obviously not only make the phase structure stable but also finer the grain of RuO2. It is suggested that at most cases SiO2 can act as a supporting frame to hold the dispersed RuO2 grains.