中文摘要：

大音阶的第五音胶化方法并且快速的热退火(RTA ) 准备的薄电影为综合引导者处理的钇铁石榴石(YIG ) 被调查。X 光检查衍射(XRD ) 结果显示 YIG 电影超过 650 退火了 ?敤牣慥敳琠敨攠潬杮瑡潩 n

英文摘要：

The yttrium iron garnet（YIG） thin films prepared by the sol-gel method and rapid thermal annealing（RTA） process for integrated inductor are investigated. The X-ray diffraction（XRD） results indicate that the YIG film annealed above 650 ℃ is poly-crystalline with single-phase garnet structure. Moreover, it can be found that the initial permeability μi, saturation magnetization MS and coercivity Hc of these YIG films increase with increasing RTA temperature. Low temperature annealing after crystallization can further improve the magnetic properties of YIG film. Thereby, a planar integrated inductor in the presence of Si substrate/SiO2 layer/Y2.8Bi0.2Fe5O12 thin film/Cu spiral coil structure is fabricated successfully by the standard IC processes. Due to the magnetic enhancement originated from YIG film, the inductance L and quality factor Q of the inductor with YIG film are improved in a certain frequency range.