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Boron doped ZnO thin films fabricated by RF-magnetron sputtering
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：2011.1.1
  • 页码：2498-2502
  • 相关项目：超大规模集成电路铜互连线的微结构及尺寸效应研究
作者： Gao, Li|Zhang, Yan|Zhang, Jian-Min|Xu, Ke-Wei|
同期刊论文项目
超大规模集成电路铜互连线的微结构及尺寸效应研究
期刊论文 28 获奖 2
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