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Stress relaxation induced faceted Cu and W particles on the surfaces of Cu-Zr and W thin films
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：8972-8977
  • 语言：英文
  • 相关项目：超薄梯度Zr/ZrN自形成扩散阻挡层特性研究
作者： Ma, F|Xu, KW|Song, ZX|Sun, HL|
同期刊论文项目
超薄梯度Zr/ZrN自形成扩散阻挡层特性研究
期刊论文 16 会议论文 3
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