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Electronic structure and optical properties of Nb doped Al2O3 on Si by atomic layer deposition
  • ISSN号：0038-1098
  • 期刊名称：Solid State Communications
  • 时间：0
  • 页码：1690-1692
  • 语言：英文
  • 相关项目：原子层淀积高介电常数栅介质的界面层抑制和性能调控
作者： Gu, Jing-Jing|Lu, Hong-Liang|Ding, Shi-Jin|Chen, Lin|Sun, Qing-Qing|Zhang, David Wei|Xu, Yan|Wang, Peng-Fei|
同期刊论文项目
原子层淀积高介电常数栅介质的界面层抑制和性能调控
期刊论文 27
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