中文摘要：

利用晶种生长和溶液处理相结合的方法在气敏元件表面制备出了ZnO纳米火炬阵列薄膜,该方法在低温下进行,对环境友好且能耗低。对制得的薄膜进行XRD表征,结果表明其主要物相为纤锌矿ZnO;并对该薄膜进行FESEM表征,发现该ZnO纳米火炬呈中空形貌,高5μm,外径2μm,壁厚约200 nm,且大小均一、排列有序。这些纳米火炬都是由粒径20 nm左右的更细小的ZnO粒子组装而成。此外还讨论了ZnO纳米火炬结构的可能生长机理。最后对这种ZnO纳米火炬阵列薄膜进行了乙醇的气敏性能测试,并与纳米棒和纳米墙等已知形貌的ZnO纳米材料相比较,结果表明纳米火炬结构的ZnO纳米材料具有更优良的气敏性能。

英文摘要：

By using the seeded growth method and solution treatment,a layer of torch-like ZnO nano-array thin film was obtained on the surface of gas sensor devices.Proceeding at low temperature,this method was both environment-friendly and energy-conserving.The thin film＇s X-ray diffraction（XRD） pattern indicated that the components of the film were mainly derived from Wurtzite type ZnO.The structural information obtained with field-emission scanning electron microscopy（FESEM） showed the morphology of hollow ZnO nanotorches with a height of 5 μm,an outside diameter of 2 μm and thickness of 200 nm,were generally even-sized as well as regularly arrayed.These ZnO nanotorches were mainly assembled by even finer ZnO particles with a diameter of around 20 nm.Also,a possible growth mechanism of the ZnO nanotorches was discussed.Finally,the gas sensitivity to ethanol of these hollow ZnO nanotorches material was measured,and the result demonstrated that the ZnO nanotorches had better gas sensitivity than those already known ZnO materials with morphologies such as nanorods and nanowalls.