中文摘要：

在用近空间升华法制备CdTe多晶薄膜时，由于CdTe源在有02的环境下多次使用，造成了源表面氧化，进而失效，严重影响所沉积的CdTe多晶薄膜性能．文中研究了多次使用后CdTe源结构形貌、成分等性能．结果表明：多次使用后的CdTe源表面有变黄的趋势，源表面有CdO粉末的存在，经Hz在一定条件的高温还原，可以去除表面的氧化物，为源的重复使用奠定基础．

英文摘要：

We studied the structure configuration and components of CdTe sources,which are often used during the preparation of the CdTe polycrystalline films with the close-spaced sublimation method. Results show that the surface of CdTe sources that are used many times are intended to become yellow, and there are CdO powders on it. The oxide on the surface can be deoxidized by H2 at high temperatures under certain conditions,which establishes a foundation for the repetitive use of CdTe source.