中文摘要：

用弹性较好的铍青铜材料作为振动元件,设计制作了＂三明治＂式差动电容检测结构的倾角传感器、给出敏感头结构尺寸,利用弹性力学分析了传感器的力学特性,推导出被测倾角和铍青铜元件偏角的关系。使用单片机,通过软件线性度补偿,提高了倾角传感器的输出线性度。该传感器结构简单,成本低,稳定性好,使用方便,并经过在全量程范围内测试,最大误差为6°。

英文摘要：

Using beryllium bronze material with good elastic property as vibration element,design a tilt sensor with‘sandwich’ type differential capacitance detection structure,the sensing head structure size,the mechanics characteristic of the sensor is analyzed using mechanics of elasticity relationship between measured angle and beryllium copper coin angle is deduced. By using single chip microcomputer,the output linearity of tilt sensor is increased using the method of software linearity compensation. The sensor has simple structure,low cost,good stability,and it is easy to use,and after being test within the whole range,the maximum error is up to 6 ° .