中文摘要：

微孔加工是微器件加工中的重要环节,飞秒激光的强烈非线性吸收和“冷加工”特性使其在玻璃微纳加工方面有独特的优势和应用前景。选用石英玻璃作为试验材料,研究飞秒激光参数对微孔深径比及形貌的影响。结果表明,飞秒激光脉冲能量、打孔速度对微孔深径比存在较大影响。随着激光能量和打孔速度的增加,微孔深径比均呈现减小趋势。通过选择适当参数,可以获得深径比大于25∶1且孔形较好、无明显裂纹的长直微孔。为了获得更好的聚焦效果,采用倍频晶体BBO获得了400 nm波长的飞秒激光。用相同聚焦透镜时400 nm飞秒激光加工的微孔比800 nm更小。此外,也对飞秒激光微孔加工中常见的缺陷进行了分析。

英文摘要：

Micro-hole drilling is an important process for microfluidic device fabrication. Owing to its strong nonlinear absorption and ＇ cold＇ processing on materials, femtosecond laser is a promising tool for micromachining of glass. In the present study, effects of femtosecond laser parameters on hole drilling of silica glass are studied. The results show that both laser energy and processing speed affect the hole diameter and depth. When selecting proper parameters, long and straight micro-holes with no obvious crack and aspect ratio over 25 ： 1 can be obtained. Furthermore, in order to obtain better focusing-condition, the frequency doubling crystal beta-barium borate （BBO） is used to obtain 400 nm wavelength femtosecond laser. Compared with 800 nm wavelength, 400 nm femtosecond laser can get smaller hole diameter under the same focusing lens. Defects during femtosecond laser hole drilling are discussed as well.