采用磁控溅射法先在Si(100)基片上沉积适当厚度的Fe薄膜作为底层,通过对Fe底层厚度及氧气流量的控制,使底层Fe形成化学计量的无缓冲层的Fe3O4多晶薄膜。通过X射线衍射和磁强计分析了样品的结构和磁性能。结果表明:当初始氧气流量为1.5mL/s时,在15nm的Fe薄膜底层上可成功制备高晶粒织构的化学计量的Fe3O4薄膜。将Fe3O4薄膜应用到巨磁电阻(giant magnetoresistance,GMR)多层膜中,由于多层膜材料间电阻率的失配,利用Fe3O4半金属薄膜并不能获得预见的大GMR效应。
Fe films with different thicknesses as underlayer on Si(100) substrate were deposited by magnetron reactive sputtering,and stoichiometric polycrystalline Fe3O4 films without a buffer layer on the Fe underlayer films were prepared by controlling the thickness of the Fe underlayer and oxygen flow rate.The structural and magnetic properties of the Fe3O4 films were determined by X-ray diffraction and magnetometry.The results reveal that at the oxygen flow rate of 1.5 mL/s,Fe3O4 films with good stoichiometry and high crystallographic quality on the 15 nm Fe underlayer could be grown after vacuum annealing.When the fabricated Fe3O4 film was used in the giant magnetoresistance(GMR) multilayer,the predicted high GMR effect was not achieved due to the mismatch of the resistivity of the multilayer.