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中文摘要：
研究了157 nm激光刻蚀光纤三维微结构的基本性能。实验结果表明,石英材料的刻蚀率随脉冲数的增加呈下降的趋势,大光斑的刻蚀率高于同等条件下小光斑的刻蚀率。为提高微孔加工的质量,脉冲频率不宜高于25 Hz。
英文摘要：
The 157 nm laser micro-ablation characteristics for optical fibers are investigated,and a 3D-microstructure of optical fiber is fabricated.Experimental results show that,with increasing the laser shot numbers,the ablation rate of fused silica fibers will reduce gradually.The larger laser spot is preferable to enhance the ablation rate.The laser repetition rate is preferably not more than 25 Hz to improve the quality of ablated micro-holes.The 157 nm laser is available for ablating three-dimensional micro-structures in optical fiber.
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