给出应用于纳米晶粒生长的动力学蒙特卡罗模型,并对模拟方法做了细致的讨论.作为一个应用实例,对薄膜生长做了分类模拟研究.结果显示,改变三维Ehrlich-Schwoebel势垒将导致薄膜生长过程中多层原子岛的结构相变.
A lattice kinetic Monte Carlo model for nano-crystal growth is presented and discussed in detail. As an example, we performed case studies of thin film growth. The result shows that an alteration of three-dimensional (3D) Ehrlich-Schwoebel (ES)barrier leads to shape transition of islands with multiple atomic layers in thin film growth.