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Development of a force-decoupled parallel alignment device for nanoimprint applications
  • ISSN号：0954-4054
  • 期刊名称：Proceedings of the Institution of Mechanical Engin
  • 时间：2013.9.9
  • 页码：127-139
  • 相关项目：具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
作者： Chong Du|Weihai Chen|Yunjie Wu|Wenjie Chen|MeiYuan|
同期刊论文项目
具有压印力解耦功能的新型纳米压印平行对准系统关键技术研究
期刊论文 9 会议论文 16
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