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中文摘要：
用射频反应磁控溅射法在不同溅射压强和氩氧比下制备了ZnO薄膜,通过X射线衍射（XRD）、扫描电镜（SEM）和光致发光（PL）谱等研究了溅射压强和氩氧比对ZnO薄膜结构和光学性质的影响。测量结果显示,所制备的ZnO薄膜为六角纤锌矿结构,具有沿c轴的择优取向;溅射压强P=0.6Pa,氩氧比Ar/O2=20/5.5sccm时,（002）晶面衍射峰强度和平均晶粒尺寸较大,（O02）XRD峰半峰全宽（FWHM）最小,光致发光紫外峰强度最强。
英文摘要：
Thin ZnO films were prepared by RF reactive magnetron sputtering with different sputtering pressure and argon-oxygen ratio.The effect of the sputtering pressure and argon-oxygen ratio on the structure and optical properties of the ZnO films were studied using the X-ray diffraction （XRD）,scanning electron microscopy （SEM） and F-7100 photoluminescence （PL） spectroscopy.The results indicated that the thin ZnO films have hexagonal wurtzite single phase structure and a preferred orientation with the c axis perpendicular to the substrates.When the sputtering pressure is 0.6 Pa and the argon-oxygen ratio is Ar/O2=20 /5.5 sccm,the （002） plane diffraction peak intensity and the grain size are larger,the FWHM of （002） peak is the smallest,UV photoluminescence peak intensity is the strongest.
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