中文摘要：

利用弹性较好的铍青铜材料作为振动元件，结合“三明治”式差动电容检测结构，设计制作了倾角传感器。给出了敏感头结构尺寸，利用弹性力学分析了传感器的力学特性，推导出被测倾角和铍铜元件偏角的关系，计算了电容敏感的电桥输出电压和铍铜元件偏角的关系。通过工艺加工制作出了10个敏感头，对其中5个进行了测试，倾斜仪的比例系数大约为16．4mV／（°）。该传感器结构简单，成本低，使用方便，敏感头性能良好。

英文摘要：

A tilt sensor is designed by using beryllium bronze with good elasticity as a vibration element and combining with the“sandwich” structure of differential capacitance detection. The sensitive head structure dimensions are given. The mechanical characteristics of sensor are analyzed by using elastic mechanics to deduce the relationship between measured angle and deflection angle of beryllium copper element. The relationship between capacitance-sensitive output voltage of the bridge and beryllium copper element angle is calculated. 10 sensitive head are produced, 5 from which are tested. The proportion coefficient of tilt meter is about 16.4mV/（° ）. The sensor has simple structure, low cost, easy use and good performance of sensitive head.