中文摘要：

目的是设计和制作一种新型压电微致动器，用于高密度硬盘磁头的精确定位。其中，压电元件由传统的或改进的溶胶一凝胶工艺制备并利用反应离子刻蚀成型，压电层厚度范围为0．6～3μm。采用X-射线衍射和原子力显微镜等对PZT薄膜的物相、表面形貌以及颗粒尺寸等进行分析。结果显示，随着PZT层厚度从0．6～3μm的不断增加，其内部颗粒尺寸也相应增大，粗糙度越低。此外，该微致动器的驱动机理通过多普勒干涉仪进行测量。结果表明，对于封装了3μm厚PZT元件的U型微致动器悬臂装置，在±20V交变电压作用下，微致动位移达到1．146μm，谐振频率超过22kHz。

英文摘要：

A new piezoelectric micro-actuator for positioning a magnetic head for a high-density hard disc device has been designed, and fabricated. The PZT thin-film or thick-film was grown on Pt/Ti/SiO2/Si substrate using a conventional or modified Sol-Gel technique and applying reactive ion etching processes to fabricate the micro-actuator. The microstructure and surface morphologies, and grain size of the PZT films were studied by X-ray diffraction, and atomic force microscopy. The results revealed that thicker （0.6～3 μm） of the PZT films grown, the larger grain size, and the lower roughness. The U-type SUS304 substrate integrated with two PZT elements was also tested and simulated in order to investigate the driving mechanics. The peak-to-peak head displacement of 1. 146 μm is achieved when an alternative voltage of ±20 V is applied on a U-type micro-actuator bonding with two 3μm-thick PZT elements and the suspension response frequency higher than 22 kHz.