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中文摘要：
采用全息光刻和湿法腐蚀光栅技术，成功制备了表面二阶金属光栅宽条型分布反馈（DFB）半导体激光器，无需二次外延生长过程，实现了宽接触室温直流下大范围稳定单纵模工作。腔面未镀膜器件，在脉冲工作条件下，注入电流为2．28A时，单面输出功率大于600mW，斜率效率达0．37mW／mA，功率效率大于11％。在连续电流注入下，当注入电流为1．6A时，单面输出功率大于200mW，光谱线宽小于0．8nm，波长随电流的调谐系数最小为0．43nm／A；注入电流为1．0A时，水平远场发散角为2．1°。
英文摘要：
This paper reports a broa＆area distributed feedback （DFB） laser with surface second-order metal grating,based on the holographic photolithography and wet etching technology without epitaxial regrowth process after the grating fabrication. At room temperature, for the uncoated device with a cavity length of 1 mm,the stable longitudinal single-mode emission around 927 nm has been achieved in a large current range. In pulsed operation, at a current of 2. 28 A, the front facet output power is above 600 roW,and the slope efficiency is as high as 0. 37 mW/mA with a wallplug efficiency of 11%. In continu- ous-wave （CW） operation,at a current of 1.6 A,the same device delivers front facet output power more than 200 mW with a spectral linewidth less than 0.8 nm and the minimum wavelength shift of 0.43 nm/ A. A small lateral far field angle of 2.1° is obtained at the current of 1 A.
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