中文摘要：

误差补偿是提高三坐标测量机整体精度的高效且经济的手段,为通过该途径实现三坐标测量机精度的提升,进行了其前行基础步骤的研究——误差源分析、误差建模及误差测量。由此,找出了对三坐标测量机精度影响重大的21项几何误差；根据误差特性,建立了对应的误差矩阵,同时介绍了测量方法和测量原理,并用实验证实了该方法的可行性,为后续的误差补偿方法来提升三坐标测量机精度奠定了基础。

英文摘要：

Error compensation is the efficient and economic method to improve the precision of coordinate measuring machine(CMM).In order to enhance CMMs’accuracy by the method,the basic research on error compensation was concentrated on,which includederror source analysis,error modeling and measurement.21geometric errors of key errors of CMM were found out error model wasestablished and the measurement method with its principle was introduced.The feasibility of the experiment was validated and it laidthe foundation for further error compensation method to enhance CMMs’accuracy.