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中文摘要：
利用磁控溅射法在不同流量的液氮低温冷却的条件下在ITO玻璃上制备WO3、LiTaO3、NiOx、ITO薄膜，5层薄膜组成ITO／WO3／LiTaO3／NiOx/ITO全固态电致变色器件。采用XRD、SEM、可见光分光光度计等测试手段进行对比分析。结果发现：低温制备的WO3薄膜为非晶态结构，在可见光范围内漂白态和着色态的平均透射率差△T可以达到70％以上。LiTaO3薄膜表面的颗粒度比较小，结构致密，其厚度对整个器件的光学性能有一定影响，在可见光范围内平均透射率达到95％。在低温条件下制备的NiOx薄膜比常温沉积的薄膜会提供更多的Ni^2＋离子参与变色反应。该器件显示出较好的电致变色特性。
英文摘要：
WO3, LiTaO3, NiOx, ITO films were respectively deposited by magnetron sputtering at room temperature and different liquid nitrogen flux cooling, of which the electrochromic in full solid film consists. XRD, SEM, spectrophotometer were used to analyze the films. The Results reveal that the WO3 films.made at low temperature are amorphous that is of benefit for Li^＋ to inject and eject. The average transmittance variation of WO3 film between bleached and colored state can reach 70% at 400-800 nm. The LiTaO3 films have smaller granularity and closed structure. Low temperature can create more Ni^2＋ to participate the electrochromic reaction and more pore for the H^＋ to inject and eject. The device exhibits remarkable electrochromic characteristic.
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