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Analysis of an electrostatic micro-actuator based on vertically- horizontally bending
  • 时间：2013
  • 页码：522-527
  • 相关项目：基于屈曲的低压高速大变形微驱动器关键技术研究
作者： Tian Wenchao|Yang Yintang|
同期刊论文项目
基于屈曲的低压高速大变形微驱动器关键技术研究
期刊论文 20 会议论文 11 著作 2
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