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中文摘要：
以一种新型的6-PSS并联微操作台为对象，将六维微位移传感器应用于微操作台的终端运动平台，设计了一种全闭环的控制系统。介绍了系统各部分的结构组成和工作原理，包括6-PSS微操作台结构及其运动学分析、六维微位移传感器组成与原理。由开闭环下的实验结论比较得知，通过基于六维微位移传感器的全闭环控制，系统定位精度得到提高，实现了终端运动平台六维位姿的精确控制。
英文摘要：
A full-closed loop control system is designed, which takes a new 6-PSS parallel micro-manipulation platform as object, and it is based on 6-axis micro-displacement sensor which is applied to terminal motion platform. The structure feature and working principle of both the 6-PSS micro-manipulation platform and the 6-axis micro-displacement sensor are described. By comparison of the experiment results in open loop and close loop, the conclusion is obtained that the precision of the system positioning is improved in the full-closed loop which is based on the 6-axis micro-displacement sensor. Thus the precise 6-axis pose control of the micro-manipulation platform can be realized.
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