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Two-dimensional self-limiting wet oxidation of silicon nanowires: Experiments and modeling
ISSN号:0018-9383
期刊名称:IEEE Transactions on Electron Devices
时间:2013
页码:2747-2753
相关项目:新型围栅硅纳米线MOS器件的涨落性与可靠性研究
作者:
Fan, Jiewen|Huang, Ru|Wang, Runsheng|Xu, Qiumin|Ai, Yujie|Xu, Xiaoyan|Li, Ming|Wang, Yangyuan|
同期刊论文项目
新型围栅硅纳米线MOS器件的涨落性与可靠性研究
期刊论文 8
会议论文 20
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