中文摘要：

本文采用多弧离子镀技术在Ti6A14V合金表面沉积TiCN防护薄膜，研究该薄膜在干摩擦，水及海水介质条件下的摩擦学行为。研究结果显示，所制备的TiCN薄膜具有均匀致密的结构，薄膜厚度约为1μn。薄膜成分主要含有Ti、N和C，并含有少量的O。C主要为污染碳和TiC的形式，N为TiN的结构，Ti主要以TiN、TiC和TiO三种价态形式存在。薄膜的硬度达到20GPa，在大气环境中薄膜摩擦系数约为0．35，明显低于未镀膜钛合金的摩擦系数（0．7）。镀膜样品的磨损率显著降低，未镀膜样品的磨损率是镀膜样品的132倍。水和海水环境下TiCN膜的摩擦系数进一步降低至0．2左右，同时磨损率也显著降低。与水环境相比，海水环境中TiCN薄膜的磨损率略有增加。

英文摘要：

The TiCN coatings were synthesized by multi-am ion plating on substrates of TCA alloy. The impacts of the synthesis conditions on the phase-structures and properties of coatings, particularly in aquarius environments, were e- valuated. The TiCN coatings were characterized with scanning electron microscopy,and X-my photoelectron spectroscopy, and energy dispersive spectroscopy. The dense compact TiCN coatings, 1 /an in thickness, mainly consist of Ti, N, and C in the forms of TiN and TiC with a small amount of TiO impurities. The results show that the TiCN coatings significantly improve the mechanical properties. For example,in air the TiCN coatings increased the hardness up to 20 GPa,decreased the friction coefficient from 0.7 of the control sample to 0.35,and reduced the wear-rate to 1/132 of that of TCA sub- strate. In water and seawater, its wear-rate is smaller and its friction coefficient is about 0.2. The wear-rate in seawater was found to be a little higher than that in water.