流体排布法是实现碳纳米管定向排列的一种简单的方法。采用流体排布法在具有浸润性图案化的基底上成功地对单壁碳纳米管(SWNTs)束进行了水平方向上的排布。将SWNTs悬浮液滴入光刻胶制成的微通道中,在流体剪切力作用下,弯曲的SWNTs在一定程度上会被拉伸并且平行地排列在纳米级宽度的微通道中。将排列好的SWNTs阵列转移到一些不同间距的金电极对上面,制作成碳纳米管场效应晶体管(CNTFET)。CNTFET的电性能测试结果表明,制备的SWNTs束可以制造出不同电极间距同时具有良好电性能的CNTFET。
Fluidic assembly method is a simple and effective way to align the single-walled carbon nanotubes(SWNTs).In this paper,we applied fluidic assembly technique to successfully align SWNTs on the parallel patterns substrate with different wettabilities.SWNTs suspension was droped into photo-resist resin mircochannels,and the shear force of solvent evaporation could stretch and align SWNTs into strands with nanoscale width in the mirochannels.Then these aligned SWNT patterns were successfully transferred to a pair of gold electrodes with different gaps to fabricate carbon nanotube field effect transistor(CNTFET).The electrical performance of CNTFET fabricated by this technique was evaluated.The result indicated that the SWNTs strands could bridge different gaps to fabricate CNTFETs with good performance.