一个基因算法(GA ) 被学习同时决定热运输性质和在厚底层上扔的薄电影的接触抵抗。Apulsed 相片热反射(PPR ) 系统为大小被采用。GA 被用来提取热性质。大小在硅底层上在不同厚度的 SiO_2 薄电影上被执行。结果证明伴有 PPR 系统的 GA 为底层上的薄电影的热性质的同时的决心是有用的。
A genetic algorithm (GA) was studied to simultaneously determine the thermal transport properties and the contact resistance of thin films deposited on a thick substrate. A pulsed photothermal reflectance (PPR) system was employed for the measurements. The GA was used to extract the thermal properties. Measurements were performed on SiO2 thin films of different thicknesses on silicon substrate. The results show that the GA accompanied with the PPR system is useful for the simultaneous determination of thermal properties of thin films on a substrate.