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13156MHz 低频功率对60MHz 射频 容性耦合等离子体的电特性的影响
  • 期刊名称：物 理 学 报
  • 时间：0
  • 页码：7038-7043
  • 语言：中文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： 袁强华|孙　恺|宁兆元-|辛　煜|黄晓江|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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