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The Effects of CHF3/Ar Gas-Mixing Ratio on Etching Characteristics of BST Thin Films
  • 期刊名称：Advanced Science Letters, Volume 19, Number 6, Jun
  • 时间：2013.6
  • 页码：1624-1627
  • 相关项目：铁电薄膜微图形化及其电性能相关性研究
作者： Zhang, Guojun|Wang, Shuya|Zhong, Zhiqin;|Wang, Gang|
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铁电薄膜微图形化及其电性能相关性研究
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