中文摘要：

以微幅振动经摩擦驱动的超声波电动机,由于自身发热的作用,导致定子振动特性发生变化,进而对其位移分辨率产生显著影响。从超声波电动机用压电元件特性出发,分析了特性波动的因素。应用单片机作为控制器,测试了运行不同阶段温度下旋转型行波超声波电动机的位移分辨率。研究发现：在起动阶段,超声波电动机本体温度变化对压电元件性能影响是非线性的,它是超声波电动机分辨率波动的主要因素之一,为在起动阶段具有高分辨率的超声波电动机设计提供依据。

英文摘要：

Ultrasonic motors were driven by micro vibration. Due to self-heating and ambient temperature, temperature leads to changes in the vibration characteristics of the stator. The stator vibration had a significant influence on displace- ment resolution. The start-up stability was analyzed focus on piezoelectric element. Single chip computer was used as con- troller, displacement resolution of the rotary traveling wave ultrasonic motor was tested at different temperatures. Fluctua- tions of resolution were decreased by using feed-forward control method. Research shows that piezoelectric element is one of the main factors affecting the performance of ultrasonic motor resolution in the start-up phase. The performance of the pie- zoelectric element is non-linear at different temperature.