中文摘要：

采用磁控溅射离子镀技术制备了一组不同Cr含量的碳基离子镀层，利用XRD、SEM、TEM、XPS及Raman光谱对镀层的微观结构进行了表征，并分析了微观结构对镀层的力学性能及摩擦学性能的影响。实验结果表明：随着Cr含量的增加，碳基镀层从典型的非晶结构转变为纳米晶/非晶复合结构，sp^2杂化键含量逐渐增加，SD3杂化键含量逐渐减少，并且碳基镀层的硬度和内应力均随着Cr含量的增加而呈现减小的趋势。微量的金属Cr掺杂可有效地降低镀层的摩擦系数和比磨损率。过量的Cr掺杂虽有利于sp^2杂化键含量的提高，但金属相的弥散分布导致了碳基镀层摩擦系数和比磨损率的增大，摩擦学性能变差。

英文摘要：

Amorphous carbon coatings mainly composed of sp3 and sp2 bonds have a great potential to be widely used in modern industry for their attractive properties, such as high hardness, high wear resistance and low friction coefficient. However, the high internal stress and poor adhesion of amorphous carbon coatings limit the range of industrial applications. In order to reduce the internal stress and im- prove the tribological performance, a series of carbon-based coatings with different atomic fraction of Cr were prepared by magnetron sputtering. The microstructure of coatings was characterized by XRD, SEM, TEM, XPS and Raman spectra. The mechanical and tribological properties of coatings were analyzed. The results showed that with the increase of atomic fraction of Cr, the carbon-based coatings changed from amorphous structure to nano-crystalline/amorphous composite structure, the ratio of sp2 bond increased and the ratio of sp3 bond decreased gradually. Also, the hardness and the internal stress showed a decreasing trend with the increase of atomic fraction of Cr. In addition, a small amount of Cr doping could effectively reduce the friction coefficient and specific wear rates of coatings. Excessive Cr doping is beneficial to the increase of the ratio of sp2 bond, however, the dispersion distribution of the metal phase leads to the increase of the friction coefficient and specific wear rates, so that the tribological properties were deteriorated.