为了对绝缘阻挡放电(DBD)等离子体进行参数优化,以常压DBD等离子体为研究对象,在常温常压下使用可见光光栅光谱仪对等离子体发光光谱进行了诊断,得到了N2和O2的第二正带跃迁谱线.通过对等离子体光谱的分析发现,等离子体发射光谱强度随着电压升高而增大,并且在39—41kHz的范围内可以获得稳定的等离子体发光.与此同时,Helium气体的引入,可以在很大程度上增加等离子体的发光强度.与理论分析结合,证实了光谱测量方法在DBD等离子体研究上的可行性.
In order to optimize the parameters of dielectric barrier-discharge plasmas, the emission spectrum of second transition line of oxygen and nitrogen under normal temperature and pressure was measured with a grating spectrometer. The results show that the intensity of the emission spectrum of the, plasma increases with the voltage, and the best frequency range to generate the plasma spectrum is 39-41 kHz. Meanwhile, the introduction of helium gas increases the intensity to a high extent. In combination with the theoretical analysis, the feasibility of spectral method in the study of dielectric barrier discharge plasma is verified.