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中文摘要：
利用自主研制的全悬浮双探针,对影响双频容性耦合等离子体径向均匀性的因素进行了研究.发现低频功率、放电气压和放电间距对径向均匀性有明显影响.合适的低频功率、放电气压及较大的极板间距可以得到更均匀的等离子体.采用与实验相同的放电参数,利用改进的二维流体模型进行理论模拟,得到了不同极板问距下径向离子密度分布,并和实验测量结果进行了比较,两者的变化趋势基本符合.
英文摘要：
The influences on dual frequency capacitively coupled plasma radial uniformity are studied with a newly developed complete floating double probe.It is found that low frequency power,discharge pressure and gap have significant effects on radial uniformity. The results show that a suitable low frequency power,discharge pressure and larger discharge gap can achieve more uniform plasma. Finally,the improved two-dimensional fluid model simulations are performed with the same discharge parameters in experiment.The radial ion density distributions are obtained for different discharge gaps.The results are almost consistent with each other.
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