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硅基压电多层膜悬臂梁的偏转模型和优化设计
  • ISSN号：1004-1699
  • 期刊名称：《传感技术学报》
  • 时间：0
  • 分类：TN384[电子电信—物理电子学]
  • 作者机构：[1]清华大学微电子学研究所,北京100084
  • 相关基金：国家自然科学重点基金支持（90407023）
作者： 方华军[1], 刘理天[1], 任天令[1]
关键词： MEMS, 压电多层膜, 悬臂梁, 微执行器, MEMS, piezoelectric multilayer film, cantilever , microactuator
中文摘要：

利用压电多层膜悬臂梁的形变曲率半径，导出了简洁的压电悬臂梁型微执行器的偏转模型．采用此模型，对硅基PZT压电悬臂梁型微执行器进行了模拟和分析．分析获得了各层薄膜结构参数与微执行器偏转位移的关系．根据此分析结果，进一步优化了压电悬臂梁型微执行器的设计，并给出了优化的方法．

英文摘要：

A concise deflection model for piezoelectric cantilever microactuators is derived using the radius of curvature of piezoelectric multilayer cantilevers. Based on the model, the piezoelectric cantilever microactuators using PZT film on silicon are simulated and analyzed. The relations between structural parameters of the films and deflection displacement of microactuators are obtained in the analysis. Furthermore, in terms of the analytical results, the piezoelectric cantilever microactuators are designed and optimized, and the optimal methods are put forward.

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期刊信息
  • 《传感技术学报》
  • 北大核心期刊（2011版）
  • 主管单位:国家教育部
  • 主办单位:东南大学 中国微米纳米技术学会
  • 主编：黄庆安
  • 地址：南京市四牌楼2号
  • 邮编：210096
  • 邮箱：dzcg-bjb@163.com
  • 电话：025-83794925
  • 国际标准刊号：ISSN：1004-1699
  • 国内统一刊号：ISSN：32-1322/TN
  • 邮发代号:28-366
  • 获奖情况:
  • 2011-2012年获中国科技论文在线优秀期刊一等奖,2012年获第四届中国高校优秀科技期刊奖,2011年获中国精品科技期刊
  • 国内外数据库收录:
  • 美国化学文摘（网络版）,荷兰文摘与引文数据库,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）
  • 被引量:18030