中文摘要：

在真空气相沉积条件下制备厚度分别为0．32μm、2．39μm、7．98μm和17．11μm的聚氯代对二甲苯膜（PC膜），采用X射线衍射仪（XRD）、原子力显微镜（AFM）和纳米压痕仪对不同厚度PC膜的结晶度、表面形貌以及力学性能进行了表征与测试。结果表明，随着成膜厚度的增加，聚氯代对二甲苯薄膜的结晶度提高，表面晶粒尺寸增大，结晶形态更加完整，其表面粗糙度、压入模量和压入硬度呈逐渐增大的趋势。而PC膜表面形貌、力学性能的差异又与结晶度密切相关。

英文摘要：

Parylene C films with thickness of 0. 32μm,2. 39μm,7. 98μm and 17. 11μm were prepared by vapor deposition polymerization method. Crystallinity and surface microstructure of the films were analyzed by X-ray diffractometer and atomic force microscope. The mechanical properties including modulus and hardness of parylene C films with different thicknesses were investigated using nanoindentation technique. The results show that crystallinity, roughness, indentation modulus and indentation hardness increased as the thickness increased successively, crystal form became more complete because of grain growth. The surface morphology, mechanical property correlate closely to the crystallinity.