中文摘要：

近年来，径向偏振光因为其特殊的偏振特性而受到广泛的关注。本文以耦合波理论中的T矩阵算法为基础，用Matlab语言编制了能够计算多层复合结构光栅的程序算法，并用此程序算法对多层光栅模型进行了理论模拟。综合模拟结果，设计出光栅周期为1000 nm、槽深为70 nm、占空比为0.5和Ti2 O5/SiO2交替镀膜35层数的径向偏振反射腔镜，并通过微纳加工工艺制备出光栅反射腔镜样品，将其应用于自行搭建的Nd ∶YAG激光器系统中，获得了输出功率12.6 W，偏振纯度为96％的径向偏振光。

英文摘要：

The radially polarized light has gotten wide attention due to its special polarization property.Based on cou-pled-mode theory,a numerical algorithm that computes the structures of the multi-layer grating is programmed by Mat-lab.The multi-layer grating model is theoretically simulated with this algorithm.According to the simulation,a radial polarization reflection cavity mirror is designed,which includes 1 000 nm grating period,70 nm groove depth,0.5 of duty cycle and 35 -layers Ti2 O5/SiO2 ,and the sample of radial polarization reflection cavity mirror is fabricated by micro-nano processing technology.This mirror is applied to the Nd ∶YAG laser,the output power up to 1 2.6 W,the purity of polarization exceed 96% radial polarization beams are obtained.