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Electrical, Optical and Micro-structural Properties of Ultra-thin HfTiON Films
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：-
  • 相关项目：钛氮共掺氧化铪栅介质薄膜的界面抑制和性能调控
作者： Jieqiong Zhang|Cong Ye|
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钛氮共掺氧化铪栅介质薄膜的界面抑制和性能调控
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