中文摘要：

为了研究掺铝氧化锌（AZO）薄膜在制备过程中不同氧气分压下的晶体结构、表面形貌和光学性能的变化,采用脉冲激光沉积法（PLD）在玻璃基片上沉积AZO薄膜。结果表明,当氧气分压为0.8 Pa时,AZO薄膜沿（002）面择优取向生长,具有最好的结晶质量,薄膜表面平整且结构致密,并且呈现出排列均匀的纳米晶粒。同时发现,随着氧气分压从0.2 Pa升高至8.0 Pa,AZO薄膜的紫外吸收边逐渐向长波方向移动。而在可见光范围内,氧气分压对AZO薄膜在可见光区透射率影响不大,透射率均在80%以上。

英文摘要：

To study the crystalline structure,surface morphology and optical property changes of AZO thin films prepared under various O2partial pressures,pulsed-laser deposition（ PLD） was used to deposit AZO thin films on glass substrates. The results showed that AZO thin films grew along with preferential orientation（ 002） and had optimal crystalline quality when oxygen partial pressure kept at 0. 8 Pa. In addition,the films had smooth surface and compacted structure and nanocrystalline grains disposed evenly on the surface of films. It also can be found that the ultraviolet absorption edge moved to the longer wavelength with the increase of oxygen partial pressure from 0. 2 Pa to 8. 0 Pa.Oxygen partial pressure had little influence on the transmittance of AZO thin films in visible light region and the transmittance of all the AZO thin films is above 80%.