中文摘要：

采用磁控溅射与低温离子渗硫复合处理工艺原位合成了CrN/MoS2固体自润滑复合膜.采用X射线光电子能谱（XPS）、俄歇电子能谱仪（AES）和扫描电子显微镜（SEM）等分析方法对CrN基固体自润滑复合膜的显微组织进行分析.并通过CETR滑动磨损试验机,对CrMoN复合膜及CrN/MoS2自润滑复合膜的摩擦学性能进行了比较研究;通过SEM对磨痕形貌进行了观察.结果显示,CrMoN复合膜经渗硫处理后,主要合成了MoS2润滑相,渗硫层厚度约为500 nm,主要相结构为CrN与MoS2及少量MoN.与CrMoN复合膜相比,CrN/MoS2固体自润滑复合膜摩擦系数较低、磨损体积较小,具有较好的耐磨性和减摩性.同时,对CrN/MoS2固体自润滑复合膜的成膜机理及磨损机制进行了探讨.

英文摘要：

The in-situ synthesis CrN/MoS2 solid self-lubricant composite coating was obtained by magnetron sputtering and low-temperature ion sulfuring.The XPS,AES and SEM equipped with EDS were used to observe and analyze the microstructure of the composite coating.The results show that the MoS2 is composed of sulfur which is infiltrated in 500 nm depth of the composite coating.The CETR inching tribology tester was used to analyze the tribological properties of CrN-based composite coating.The wear volume from big to small is CrMoN〉CrN/MoS2.It means that the CrN/MoS2 solid self-lubricant composite coating shows better wear resistance and antifriction.The film-forming mechanism and the frictional wear mechanism of CrN-based solid self-lubricant composite coating were discussed.