使用角谱表示和严格的模式理论研究了线偏振高斯光束通过特征尺寸与波长可比拟的条形浮雕光栅的传输,系统参数误差对浮雕层中光强最大值的影响.研究表明,光束在条形浮雕光栅各层中有不同的光强分布,浮雕层的介质填充部分中的光强明显高于展空部分的光强.光栅周期误差对浮雕层中最大光强的影响起主要作用.并利用模拟退火优化算法优化系统参数以控制出射光束的光强分布.
Based on the angular spectrum representation and strict modal theory, the propagation of linearly polarized Gaussian beams through a bar relief diffraction grating whose characteristic size is comparable with the wavelength, and the influence of errors of grating structure parameters on the maximum intensity in the relief layer are studied. It is shown that the propagation behavior of beams in each layer is different. The intensity in the relief part is higher than that in the unfilled part. The influence of errors of the grating period on the maximum intensity in the relief layer is dominant. By using the simulated anneal algorithm, system parameters are optimized to control the output beam intensity profile.