提出了一种新型气体传感器敏感结构模型,即在传统连续平面敏感结构的基础上,将连续平面敏感结构的上半部分离散化,使之成为离散半球体阵列结构,建立半球体的扩散方程,分析了具有新型和传统型敏感结构的传感器的响应时间,并进行比较,说明具有离散半球体阵列敏感结构的传感器具有更快的响应速度。
A new type of sensitive structure model of gas sensor is presented. On the basis of traditional continuous flat sensitive structure, the top half is discrete, and becomes discrete hemisphere array structure. A diffusion equation of the hemisphere is established, and the respective response times of gas sensors which have new-type and traditional sensitive structure respectively are analyzed and compared. The results show that gas sensor with discretized hemisphere array sensitive structure has faster response speed.