中文摘要：

通过磁控溅射沉积、阳极氧化与溶胶-凝胶结合的多步技术在Si（100）表面制备了HA/Al2O3复合生物涂层材料。采用TG-DSC测定了复合涂层中HA外层的烧成温度,采用XRD、FT-IR以及EDS分析了Si（100）基HA/Al2O3复合生物涂层的组成,并借助SEM研究了复合涂层的表面与截面的微观形貌。研究表明,凝胶完全转变为HA外层的最低温度约为550℃,凝胶经600℃处理30min后可在Si（100）- Al2O3基上形成具有一定数量纳米细孔且含有少量CO3的HA外层;HA外层嵌入Si（100）基阳极氧化Al2O3多孔层的孔洞中构成HA/Al2O3复合生物涂层。

英文摘要：

A composite biocoating, HA/Al2O3, was fabricated on Si（100） by a multi-step method including magnetron sputtering, anodization and sol-gel treatment. TG-DSC was applied to determining the sintering parameters of HA outer layer in as-prepared composite biocoating. XRD, FT-IR, EDS, and SEM were employed to investigate the compositions and morphologies of the HA/Al2O3 composite biocoating on Si（100）. Results show that gel can be converted into HA under a temperature above 550℃. After sintering at 600℃ for 30min, CO3-containing HA layer with nano-metric pores is formed on Si（100）-Al2O3 substrate. The as-obtained Si （100）-based composite biocoating is characterized as an interlocking interface between HA outer layer and anodic Al2O3 intermediated layer due to the incorporation of HA into the pores of anodic Al2O3.