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Simultaneous phase-shifting interferometry: immune to azimuth error of fast-axes in retarder array
  • ISSN号：1559-128X
  • 期刊名称：Applied Optics
  • 时间：2015.11.20
  • 页码：9803-9808
  • 相关项目：短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
作者： Li, Jinpeng|Gu, Chenfeng|Zhu, Wenhua|Han, Zhigang|
同期刊论文项目
短相干光显微干涉理论及摆臂式轮廓仪的非接触测量方法研究
期刊论文 26 会议论文 2
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