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中文摘要：
利用制作在P-DBRs表面的亚波长金属光栅,在980 nm高功率底发射垂直腔面发射激光器有源区引入各向异性增益,达到了偏振控制的目的。本光栅基于等效介质理论和抗反射理论设计而成,光栅周期为186 nm,占空比为0.5。通过多物理场有限元分析软件对所设计的光栅进行了模拟分析,结果基本上符合设计要求。通过优化工艺步骤得到了较好的实验结果,550μm孔径的VCSEL在正交方向上的偏振比为3,输出功率达到870 mW。
英文摘要：
The polarization control of vertical-cavity surface-emitting lasers with high power emission was demonstrated by using metal-grating to import non-isotropic gain.The grating with a period of 186 nm and a duty ratio of 0.5 which were calculated based on effective medium theory and antireflection theory.Then,it was simulated by multiphysics field of finite element analysis software,and the results correspond well with our design requirements.A polarization ratio of 3,an output power of 870 mW was demonstrated for a 550 μm aperture device.
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