中文摘要：

提出了由棱镜波导耦合装置测量得到的条形波导有效模折射率确定其二维（2D）折射率分布的方法,其中条形波导样品是在磷酸盐玻璃基底上用离子交换方法制备的,采用不同交换时间和不同掩膜开口宽度制备出不同的折射率渐变分布条形波导。计算过程是先给定条形波导二维折射率分布的拟合函数及参数,按照Wentzel-Kramer-Brillouin（WKB）方法和有效折射率方法,由二维折射率分布的拟合函数计算出条形波导的有效模折射率,并将计算出的有效模折射率与测量值进行比较,通过调整修改折射率分布拟合函数中的参数,使有效模折射率的计算值与测量值接近,从而确定出被测条形波导的折射率分布。在掩膜开口宽度、离子交换温度和时间等制备工艺参数与形成的条形波导的折射率分布参数之间建立联系,为可重复性制备高质量的波导器件提供可靠的制备工艺参数。

英文摘要：

A method for determining the two-dimensional（2D） index profiles of channel waveguides by the datum of the effective indexes measured by prism coupling method is proposed.The channel waveguides are home-fabricated by ion-exchanged method on the substrate of phosphate glass with various diffusion times and various mask opening widths.The method for calculating the 2D index profiles is set up based on the theory of graded-index waveguides,such as Wentzel-Kramer-Brillouin（WKB） method and effective index method.First,an index profile function is supposed.Then its effective indexes calculated by a homemade program based on WKB method and effective index method are compared with the measured results of the effective index.Finally the best-fit index profile is reconstructed by modifying the supposed index profile until the calculated effective indexes are becoming very close to the measurement of the effective indexes.The relationships between the fabricating parameters,such as diffusion time and mask opening width,with index profile of waveguides can be set up.This work could be useful for optimizing the fabrication process of channel waveguides in order to obtain high quality waveguide lasers and photonic waveguide devices repeatedly and effectively.