Design and implementation of precise position controller of active probe of atomic force microscopy for nanomanipulation
ISSN号:1004-373X
期刊名称:《现代电子技术》
时间:0
分类:O57[理学—粒子物理与原子核物理;理学—物理]
作者机构:[1]School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110004, China, [2]Department of Electrical and Computer Engineering, Michigan State University East Lansing MI, 48824, USA
相关基金:Supported by the National Natural Science Foundation of China (Grant No. 60675050)