中文摘要：

This paper reports on an experiment designed to test electromagnetic（EM）attenuation by radio-frequency（RF）plasma for cavity structures.A plasma reactor,in the shape of a hollow cylinder,filled with argon gas at low pressure,driven by a RF power source,was produced by wave-transmitting material.The detailed attenuations of EM waves were investigated under different conditions:the incident frequency is 1-4 GHz,the RF power supply is 13.56 MHz and1.6-3 k W,and the argon pressure is 75-200 Pa.The experimental results indicate that 5-15 d B return loss can be obtained.From a first estimation,the electron density in the experiment is approximately（1.5-2.2）×1016m-3and the collision frequency is about 11-30 GHz.The return loss of EM waves was calculated using a finite-difference time-domain（FDTD）method and it was found that it has a similar development with measurement.It can be confirmed that RF plasma is useful in the stealth of cavity structures such as jet-engine inlet.

英文摘要：

This paper reports on an experiment designed to test electromagnetic（EM）attenuation by radio-frequency（RF）plasma for cavity structures.A plasma reactor,in the shape of a hollow cylinder,filled with argon gas at low pressure,driven by a RF power source,was produced by wave-transmitting material.The detailed attenuations of EM waves were investigated under different conditions：the incident frequency is 1-4 GHz,the RF power supply is 13.56 MHz and1.6（-3） k W,and the argon pressure is 75-200 Pa.The experimental results indicate that 5-15 d B return loss can be obtained.From a first estimation,the electron density in the experiment is approximately（1.5-2.2）×1016m（-3）and the collision frequency is about 11（-3）0 GHz.The return loss of EM waves was calculated using a finite-difference time-domain（FDTD）method and it was found that it has a similar development with measurement.It can be confirmed that RF plasma is useful in the stealth of cavity structures such as jet-engine inlet.