中文摘要：

采用直流反应磁控溅射技术，在AISI304不锈钢基体上镀制了三种具有不同插入层结构的CrNx涂层．用X射线晶体衍射仪（XRD）表征了涂层的晶体结构，用扫描电子显微镜（SEM）观察了涂层的横断面组织形貌，用原子力显微镜（AFM）观察分析了涂层的表面形貌，并用划痕法测试涂层的结合力，纳米硬度计测试涂层硬度．所有涂层都呈B1 NaCl型面心立方结构，具有明显的（200）择优取向．但是，具有不同插入层结构的涂层的晶体衍射峰的位移角度及方向不同．并且在具有Cr／CrNx多层交替结构作为插入层的涂层的晶体结构中出现了Cr的衍射峰．在这种具有不同插入层结构的CrNx涂层中，Cr／CrNx多层交替结构作为插入层的涂层具有最小晶粒尺寸，较高的表面粗糙度，最高的纳米硬度值和较差的膜基结合力；而具有氮含量连续增加梯度结构作为插入层的涂层晶粒尺寸较大，表面粗糙度较低，膜基结合力好，但纳米硬度值较低．

英文摘要：

CrNx coatings with different interlayer were deposited on AISI 304 stainless steel substrate by conventional DC magnetron sputtering technology in this paper. The crystal structure of prepared coatings was characterized by X-ray diffractometry. The fractured cross-sectional morphology of the coatings was observed using scanning electron microscopy. The surface morphology of coatings was analyzed using atomic force microscope. The mechanical properties of the samples such as hardness and adhesion were characterized using nanoindentation technique and scratch test. The results show that all investigated CrNx coatings presented a B1 NaCl type crystal structure with a stronger （200） preferred orientation. However, the shift of CrN diffraction peaks and its orientation are different in CrNx coatings with different interlayer. Furthermore, there are Cr phases in the coatings that Cr/CrNx multilayer was alternately deposited in the interlayer. In three kinds of them, CrN, coatings that Cr/CrNx multilayer was alternately deposited in the interlayer showed the smallest grain size, more rough surface, and in turn higher hardness of about 31GPa and worse adhesion. On the contrary, CrNx coatings that the content of nitrogen is gradually increased in the interlayer presented the bigger grain size, smooth surface, and in turn lower hardness and best adhesion.