中文摘要：

采用基于有机模板的溶液浸渍一无损转移法制备zn0微纳多孔有序薄膜，研究了在不同紫外光强度照射下和不同尺寸孔径的zn0微纳多孔有序薄膜对N02气敏性能的影响。结果表明，rX500nrfl聚苯乙烯（Ps）球为模板制备的ZnO微纳多孔薄膜传感器，在0．35mW／cm。紫外光照射下具有较高的灵敏度、较快的响应和恢复时间。随着紫外光强度的增强和孔径尺寸的增大，ZnOg微纳多孔薄膜传感器的灵敏度降低；且在紫外光照射下ZnO微纳有序多孔薄膜对乙醇、甲醛、H2S、S02和CH4等气体具有很好的选择性。

英文摘要：

Zinc oxide （ZnO） mocro/nanoporous array thin film-based gas sensors were prepared by the organic template-based solution dipping monolithic transfer strategy. The research focuses on nitrogen dioxide （NO2） gas sensing properties of different aperture sizes of ZnO micro/nanoporous array thin films under UV irradiation with different intensity. The results show that ZnO micro/nanoporous array thin film can be obtained by 500 nm polystyrene （PS） as template, the film-based sensor has high sensitivity and fast response and recovery time when the intensity of UV light is 0.35 mW/cm^3. This kind of sensor shows good anti-disturbance to the other gases, such as acetone, formaldehyde, H2S, SO2, and CH4.