中文摘要：

采用离子镀技术在硅片基体上对CrN涂层进行碳元素掺杂得到Cr-C-N三元复合涂层,利用扫描电镜（SEM）、电子能谱（EDS）、X射线光电子能谱仪（XRD）等对其涂层组织形貌及成分进行表征,用摩擦磨损试验仪及电化学工作站测试涂层的磨损及电化学性能。结果表明：对CrN涂层进行碳元素掺杂可得到Cr-C-N三元复合涂层,Cr-C-N中的C元素以硬质碳化物Cr7C3的形式在晶界区域偏聚形成“富碳”骨架网络,力学性能与耐海水腐蚀性能均有明显提升,同时涂层表面也因碳化物偏聚出现微区硬度差异较大的现象,承受载荷时应力不连续状态导致其摩擦因数较CrN涂层有小幅升高,但在大载荷高速滑动时表现出较低的磨损率。

英文摘要：

CrN and Cr-C-N coatings have been prepared on the surface of single crystal silicon by arc ion plating. Surface morphology, microstructure, phase compositions, and electrochemistry properties were characterized by SEM, EDS TEM, XRD, and wear test and electrochemical workstation. The results show that carbon atoms combining with and chromium form a ＂carbon-riched＂ skeleton network in Cr-C-N ternary coating, which can improve mechanical properties and wear resistance obviouly. Segregation of chromium carbide on the grain boundarys can cause discontinuous hardness changes on the coating. Compared with CrN coating under seawater surroundings, Cr-C-N coating under discontinuous stress state shows the slightly increasing friction coefficient, but it exerts lower wear rate under high load and high speed state.