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中文摘要：
给出了一种基于MEMS工艺的二维热风速传感器的设计、制造以及测试结果．该传感器采用恒功率工作方式，利用热温差的方法测量风速和风向．本传感器采用MEMS剥离工艺在玻璃衬底上同时加工出加热电阻和测温电阻，利用简单可靠的加工工艺实现了热隔离和高灵敏度．经过风洞风速风向测试，得知传感器的风速量程超过10m／s，360°范围内风向测量误差不超过8°．传感器的响应时问不超过1s，功耗为10mW．
英文摘要：
The design, fabrication,and test results of a 2D thermal wind sensor are presented. The wind sensor measures wind speed and direction by calorimetric principle in constant power mode. Heater and detector resistors are fabricated on glass substrate using a lift-off process. The fabrication is simple and reliable, and good thermal isolation and high sensitivity are achieved. The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°. The response time of the sensor is less than ls,and the heat power is 10mW.
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