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Elman neural network based dynamic scheduling of wafer photolithography process
  • 所属机构名称：同济大学
  • 会议名称：International Conference on Computer-Aided Material and Engineering (ICCME)
  • 时间：2011.3.3
  • 成果类型：会议
  • 相关项目：带驻留与资源约束的多重入集束型晶圆制造设备群调度模型与算法研究
作者： Zhou, Binghai|
同会议论文项目
带驻留与资源约束的多重入集束型晶圆制造设备群调度模型与算法研究
期刊论文 39 会议论文 6
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